Microelectronic Device Testing Apparatus and Method
AssigneeAnalog Devices, Inc.
InventorsWei Chen, Huy Khanh Tang
Life of this patent
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Abstract
A microelectronic device tester has a mounting member (for mounting a device), a drive shaft connected to the mounting member, and a vibration shaft mechanically in communication with the drive shaft. The drive shaft and vibration shaft are non-coaxial, and the drive shaft has a drive shaft proximal end and a drive shaft distal end. The drive shaft proximal end is connected to the mounting member, and the drive shaft distal end terminates proximal of the entire vibration shaft.
Claims20
A microelectronic device tester comprising:
- a mounting member for mounting a device;
- a drive shaft connected to the mounting member;
- and
- a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial,
- the drive shaft having a drive shaft proximal end and a drive shaft distal end,
- the drive shaft proximal end connected to the mounting member, the drive shaft distal end terminating proximal of the entire vibration shaft.
A microelectronic device tester comprising:
- a mounting member for mounting a device;
- a drive shaft connected to the mounting member;
- and
- a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial,
- the drive shaft forming a drive shaft projection on the mounting member,
- the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection.
A method of testing a microelectronic device, the method comprising:
- providing a tester comprising:
- a mounting member for mounting a device;
- a drive shaft connected to the mounting member;
- and
- a vibration shaft mechanically in communication with the drive shaft, the drive shaft and vibration shaft being non-coaxial,
- the drive shaft forming a drive shaft projection on the mounting member, the vibration shaft forming a vibration shaft projection on the mounting member, at least a portion of the vibration shaft projection intersecting the drive shaft projection;
- mounting a microelectronic device to the mounting member;
- and
- rotating the mounting member to generate a test signal from the microelectronic device.
Dependencies are inferred from the claim text.