Microelectromechanical z-axis detection structure with low thermal drifts

A microelectromechanical device, comprising:

• an interface circuit;
• and
• a MEMS structure electrically coupled to the read-interface circuit and including:
• a substrate having a top surface;
• a first fixed-electrode arrangement on the top surface of the substrate;
• a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement at a separation distance;
• connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance;
• a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements;
• and
• an anchoring arrangement configured to couple said coupling mass to said substrate, the anchoring arrangement being coupled to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element.

An electronic device, comprising:

• a microprocessor unit;
• and
• a microelectromechanical device that includes:
• an interface circuit electrically coupled to the microprocessor unit;
• and
• a MEMS structure electrically coupled to the interface circuit and including:
• a substrate having a top surface;
• a first fixed-electrode arrangement on the top surface of the substrate;
• a mobile mass extending in a plane and suspended above said substrate and said first fixed-electrode arrangement at a separation distance;
• connection elastic elements configured to support said mobile mass and allow the mobile mass to move out of said plane and modify said separation distance;
• a coupling mass suspended above said substrate and connected to said mobile mass via said connection elastic elements;
• and
• an anchoring arrangement configured to anchor said coupling mass to said substrate, the anchoring arrangement being connected to said substrate at a first point of constraint and in a position corresponding to said first fixed-electrode arrangement, wherein said anchoring arrangement includes a first anchoring element rigidly coupled to said substrate at the first point of constraint, and a first supporting elastic element coupling said coupling mass to said first anchoring element.