US 2013/0239681 A1Published application

Angular velocity sensor

AssigneePanasonic Corporation

InventorsTsuyoshi Fujii, Kensaku Yamamoto

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Abstract

An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis.

Claims14

Dependent claims

An angular velocity sensor comprising

a sensor element having a shape defined in an XYZ space having an X axis, a Y axis, and a Z axis that are orthogonal to one another, the sensor element being capable of detecting an angular velocity about the Z axis,
wherein the sensor element including:
a support body extending in a direction of the X axis;
a first area having a first end and a second end opposite to the first end, the first end being connected with the support body;
and
a first weight connected with the second end of the first arm,
wherein the first arm has substantially a J-shape including:
a first arm portion extending in a direction of the Y axis from the first end to a first corner;
a second arm portion extending in the direction of the X axis from the first corner to a second corner;
and
a third arm portion extending in the direction of the Y axis from the second corner to the second end, and
wherein a length of the first arm in the direction of the X axis is larger than a length of the first weight in the direction of the X axis.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/989,644Filed 22 Dec 2011
Priority: JP 2010-29193128 Dec 2010
Published: 19 Sep 2013
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01C 19/5719
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using planar vibrating masses driven…
G01C 19/56
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic…:…
G01C 19/5607
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using vibrating tuning forks
G01C 19/574
Structural details or topology: the devices having two sensing masses in anti-phase motion

Family

US 9,303,993 B2Related patent
US 2013/0239681 A1This patent

From the US filing history. Foreign family members aren’t listed.

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