Three-axis gyroscope
OwnerPavel Kornilovichinventor
Life of this patent
Estimating the term…
Abstract
Apparatus related to measuring angular velocities in three-space are provided. Drive masses distributed in a plane are force-oscillated in two orthogonal directions such that gyration of the collective is performed. Sense masses coupled by flexures to the drive masses are each displaceable along a respective single degree of freedom in response to angular velocities about a vector orthogonal to that degree of freedom. Electronic circuitry measures the respective sense mass displacements and provides corresponding signaling. The drive masses and sense masses can be formed such that a microelectromechanical system (MEMS) device is defined.
Claims16
An apparatus, comprising:
- a plurality of drive masses disposed in a plane, the drive masses configured to be simultaneously oscillated in two orthogonal directions in the plane;
- and
- a plurality of sense masses, each sense mass configured to be displaced within a respective single-axis range in response to angular velocity of the apparatus about a vector orthogonal to the respective single-axis range, each drive mass supporting one or more of the sense masses.
A microelectromechanical system (MEMS) device, comprising:
- a substrate;
- a plurality of drive masses supported in overlying relationship to the substrate and distributed in a plane, the drive masses configured to be gyrated as an entity by way of forced oscillations in two orthogonal axes in the plane;
- and
- a plurality of pairs of sense masses, each pair supported by a respective one of the drive masses, each sense mass displaceable in a single degree of freedom in response to angular velocity of the MEMS device about a vector orthogonal to the respective degree of freedom.
Dependencies are inferred from the claim text.