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US 2013/0239404 A1Published application
System and Method for Integrated Inductor
AssigneeInfineon Technologies AG
InventorsCarsten Ahrens, Gunther Mackh, Klemens Pruegl
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Abstract
In one embodiment, an inductor has a substrate, a conductor disposed above the substrate and a seamless ferromagnetic material surrounding at least a first portion of the conductor.
Claims20
A method of manufacturing a circuit, the method comprising:
- depositing a conductive line on a substrate;
- removing a portion of the substrate adjacent to at least a portion of the conductive line;
- and
- depositing a seamless magnetic material surrounding at least the portion of the conductive line.
1 more element
A method of forming an inductor, the method comprising:
- providing a substrate;
- forming a conductive line on the substrate;
- etching a portion of the substrate adjacent to at least a portion of the conductive line;
- and
- forming a seamless magnetic material around at least the portion of the conductive line.
2 more elements
A method of forming an inductor comprising:
- providing a substrate;
- forming a trench in the substrate;
- forming a conductor in the trench;
- forming a gap extending from a top surface of the substrate through a bottom surface of the substrate;
- and
- forming a seamless magnetic material surrounding at least a first portion of the conductor and filling the gap.
3 more elements
Dependencies are inferred from the claim text.