Methods for forming nickel oxide films for use with resistive switching memory devices/us
AssigneeIntermolecular, Inc.
InventorsZhi-Wen Sun, Jinhong Tong, Chi-I Lang, Tony Chiang
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AssigneeIntermolecular, Inc.
InventorsZhi-Wen Sun, Jinhong Tong, Chi-I Lang, Tony Chiang
Estimating the term…
Methods for forming a NiO film on a substrate for use with a resistive switching memory device are presenting including: preparing a nickel ion solution; receiving the substrate, where the substrate includes a bottom electrode, the bottom electrode utilized as a cathode; forming a Ni(OH)2 film on the substrate, where the forming the Ni(OH)2 occurs at the cathode; and annealing the Ni(OH)2 film to form the NiO film, where the NiO film forms a portion of a resistive switching memory element. In some embodiments, methods further include forming a top electrode on the NiO film and before the forming the Ni(OH)2 film, pretreating the substrate. In some embodiments, methods are presented where the bottom electrode and the top electrode are a conductive material.
A method of forming a resistive switching memory element, the method comprising;
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