Plasma boundary limiter unit and apparatus for treating substrate
AssigneeSemes Co., Ltd.
InventorsIl Gyo KOO, Hyun Jong SHIM
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Abstract
Provided is an apparatus for treating a substrate. The apparatus comprises a plasma boundary limiter unit disposed within a process chamber to surround a discharge space defined above a support unit. The plasma boundary limiter unit comprises a plurality of plates disposed along a circumference of the discharge space, and the plurality of plates are spaced apart from each other along the circumference of the discharge space so that a gas within the discharge space flows to the outside of the discharge space through passages provided between the adjacent plates.
Claims27
An apparatus for treating a substrate, the apparatus comprising:
- a process chamber having an opening through which the substrate is loaded or unloaded, the process chamber comprising a door assembly for opening or closing the opening;
- a support unit disposed within the process chamber to support the substrate;
- a gas supply unit for supplying a process gas into the process chamber;
- a plasma generation unit for generating plasma from the process gas;
- and
- a plasma boundary limiter unit disposed within the process chamber to surround a discharge space defined above the support unit, the plasma boundary limiter unit minimizing the plasma from leaking from the discharge space,
- wherein the plasma boundary limiter unit comprises a plurality of plates disposed along a circumference of the discharge space, and
- the plurality of plates are spaced apart from each other along the circumference of the discharge space so that a gas within the discharge space flows to the outside of the discharge space through passages provided between the adjacent plates.
A plasma boundary limiter unit that is used for minimizing leakage of plasma from a discharge space to the outside in an apparatus for treating a substrate by using the plasma, the plasma boundary limiter unit comprising:
- a plurality of plates disposed along a circumference of the discharge space,
- wherein the plurality of plates are spaced apart from each other along the circumference of the discharge space so that a gas within the discharge space flows to the outside of the discharge space through passages provided between the adjacent plates.
Dependencies are inferred from the claim text.