Coating source and process for the production thereof
AssigneePlansee SE
InventorsPeter Polcik, Conrad Polzer, Matthias Perl, Stefan Schlichtherle, Georg Strauss
Life of this patent
Estimating the term…
Abstract
A coating source for physical vapor deposition has at least one component, which has been produced from at least one pulverulent starting material in a powder metallurgy production process and at least one ferromagnetic region embedded in the component. The at least one ferromagnetic region, is introduced into the component and fixedly connected to the component during the powder metallurgy production process.
Claims14
1-13. (canceled)
A coating source for physical vapor deposition, comprising:
- at least one component formed in a powder-metallurgical production process from at least one pulverulent starting material;
- and
- at least one ferromagnetic region embedded in said at least one component, said at least one ferromagnetic region having been introduced into said at least one component and fixedly connected to said at least one component in the powder-metallurgical production process.
A method for producing a coating source for physical vapor deposition, the method comprising the following steps:
- placing pulverulent starting material for at least one component of the coating source into a mold;
- introducing ferromagnetic powder and/or at least one ferromagnetic body into the mold, for placing the ferromagnetic powder and/or the at least one ferromagnetic body in at least one region of the pulverulent starting material;
- and
- compacting the component thus formed.
Dependencies are inferred from the claim text.