Drawing apparatus, and method of manufacturing article

A method of manufacturing an article, the method comprising:

• performing drawing on a substrate using a drawing apparatus;
• developing the substrate on which the drawing has been performed;
• and
• processing the developed substrate to manufacture the article,
• wherein the drawing apparatus performs the drawing on the substrate with a plurality of charged particle beams, the apparatus including:
• a blanking device configured to individually blank the plurality of charged particle beams;
• a scanning deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate;
• and
• a controller configured to generate a periodic signal to control a periodic deflection operation of the plurality of charged particle beams by the scanning deflector,
• wherein the controller is configured to adjust an amount of deflection of the plurality of charged particle beams by the scanning deflector in a period of the periodic signal so that a scanning speed of the plurality of charged particle beams becomes a target speed.