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AssigneeUlvac, Inc.
InventorsTakuro Hayashi, Kouji Sogabe, Koichi Matsumoto, Masanori Hashimoto, Kyuzo Nakamura, Munemoto Hagiwara, Hiroto Uchida, Katsuhiko Mori, Yasuo Shimizu, Moriaki Sakamoto
Estimating the term…
Ignition sections are provided at two locations on each of lower portions of the side surfaces on both sides of a film-forming chamber so as to be provided at four locations in total. A flowing current is applied to the ignition sections when a flammable by-product is ignited. A first detecting section for measuring a pressure in the film-forming chamber is formed on the side surface of the film-forming chamber. A second detecting section is formed at the lower portion of the side surface of the film-forming chamber. A third detecting section for measuring a spatial temperature in the film-forming chamber is formed at an upper portion of the film-forming chamber.
A film-forming apparatus comprising:
A method for maintaining a film-forming apparatus that forms a film on a substrate under reduced pressure, the method comprising:
Dependencies are inferred from the claim text.