Method for removing germanium suboxide
AssigneeNational Chiao Tung University
InventorsPo-Tsun Liu, Chen-Shuo Huang
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Abstract
A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.
Claims11
A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide, comprising causing a supercritical fluid composition that includes a supercritical carbon dioxide (scCO2) fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.
Dependencies are inferred from the claim text.