Methods of manufacturing target for generating charged particles, target structures, and treatment apparatuses including the target structures

A target comprising:

• a substrate;
• a source layer disposed on the substrate;
• and
• a metal thin layer comprising holes partially exposing the source layer.

A treatment apparatus comprising:

• a light source providing a laser beam;
• a guiding structure disposed at an incidence side of the laser beam provided by the light source;
• and
• a target comprising a substrate fixed to the guiding structure, a source layer disposed on the substrate, and a metal thin layer comprising holes partially exposing the source layer,
• wherein the metal thin layer accelerates, through surface plasmon resonance, charged particles generated in the source layer by the laser beam passing through the holes.