Single crystal silicon tfts made by lateral crystallization from a nanowire seed
AssigneePalo Alto Research Center Incorporated
InventorsRobert A. Street, Sourobh Raychaudhuri
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AssigneePalo Alto Research Center Incorporated
InventorsRobert A. Street, Sourobh Raychaudhuri
Estimating the term…
A method can include depositing a thin metal film on a substrate of a sample, establishing a metal island on the substrate by patterning the thin metal film, and annealing the sample to de-wet the metal island and form a metal droplet from the metal island. The method can also include growing a nanowire on the substrate using the metal droplet as a catalyst, depositing a thin film of a semiconductor material on the sample, annealing the sample to allow for lateral crystallization to form a crystal grain, and patterning the crystal grain to establish a crystal island. An electronic device can be fabricated using the crystal island.
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Dependencies are inferred from the claim text.