Method for improved mobility using hybrid orientaion technology (HOT) in conjunction with
AssigneeTexas Instruments Incorporated
InventorAlexander H. Owens
Life of this patent
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AssigneeTexas Instruments Incorporated
InventorAlexander H. Owens
Estimating the term…
A semiconductor apparatus includes a first substrate and a second substrate located over a first portion of the first substrate and separated from the first substrate by a buried layer. The semiconductor apparatus also includes an epitaxial layer located over a second portion of the first substrate and isolated from the second substrate. The semiconductor apparatus further includes a first transistor formed at least partially in the second substrate and a second transistor formed at least partially in or over the epitaxial layer. The second substrate and the epitaxial layer have bulk properties with different electron and hole mobilities. At least one of the transistors is configured to receive one or more signals of at least about 5V. The first substrate could have a first crystalline orientation, and the second substrate could have a second crystalline orientation.
A method comprising:
Dependencies are inferred from the claim text.