Methods of Forming Graphene-Containing Switches

A method of forming a switch, comprising:

• forming a first electrically conductive structure over a bottom electrode;
• forming a graphene structure electrically coupled with the bottom electrode and laterally spaced from the first electrically conductive structure;
• forming a second electrically conductive structure over the bottom electrode and on an opposing side of the graphene structure from the first electrically conductive structure;
• forming a top electrode over the graphene structure;
• the bottom electrode being electrically coupled with one of the first and second electrically conductive structures, the top electrode being electrically coupled with the other of the first and second electrically conductive structures;
• and
• wherein the first and second electrically conductive structures impart an electric field across the graphene structure.

A method of forming a switch, comprising:

• forming first and second electrically conductive structures over a bottom electrode and laterally spaced from one another;
• the first electrically conductive structure directly contacting the bottom electrode, and the second electrically conductive structure not directly contacting the bottom electrode;
• electrically coupling a graphene structure with the bottom electrode;
• forming a top electrode over the graphene structure and the first and second electrically conductive structures;
• the top electrode being electrically coupled with the graphene structure, directly contacting the second electrically conductive structure, and not directly contacting the first electrically conductive structure;
• and
• wherein the first and second electrically conductive structures impart an electric field across the graphene structure.

A method of forming switches, comprising:

• forming a pair of spaced apart bottom electrodes over a semiconductor substrate;
• forming a first dielectric material over the bottom electrodes;
• forming an opening extending through the first dielectric material to the bottom electrodes;
• forming a pair of metal-containing upwardly-extending electrically conductive structures along sidewalls of the opening, one of the upwardly-extending electrically conductive structures being directly against one of the bottom electrodes and the other of the upwardly-extending electrically conductive structures being directly against the other of the bottom electrodes;
• forming second dielectric material along sidewalls of the upwardly-extending electrically conductive structures, portions of the bottom electrodes being exposed after formation of the second dielectric material;
• forming a pair of graphene structures extending upwardly from the exposed portions of the bottom electrodes;
• a first of the graphene structures being electrically coupled with, and directly over, one of the bottom electrodes;
• a second of the graphene structures being electrically coupled with, and directly over, the other of the bottom electrodes;
• forming third dielectric material along sidewalls of the graphene structures;
• forming a pair of metal-containing downwardly-extending electrically conductive structures along the third dielectric material;
• forming fourth dielectric material between the downwardly-extending electrically conductive structures;
• and
• forming a pair of top electrodes over the graphene structures and the downwardly-extending electrically conductive structures;
• one of the top electrodes being electrically coupled with the first graphene structure and with one of the downwardly-extending electrically conductive structures, and the other of the top electrodes being electrically coupled with the second graphene structure and with the other of the downwardly-extending electrically conductive structures.