Composition for forming a developable bottom antireflective coating

A composition for forming a bottom anti-reflective coating, comprising

• a solvent,
• a polymer represented by the following formula (1):
• -Am-Bn- (1)
• in which
• A and B are repeating units represented by the following formulas (A) and (B), respectively:
• wherein
• each of R11 and R12 is independently hydrogen or an alkyl group;
• L′1 is a single bond, COO or a straight- or branched chain alkylene containing one or more carbon atoms;
• Y is a condensed polycyclic aromatic group containing two or more benzene rings;
• and
• Z is a group selected from the group consisting of R3COOR4 and R3OR4, provided that R3 is a single bond, oxygen or a straight- or branched chain alkylene which may have a fluorine atom and which contains one or more carbon atoms and also provided that R4 is hydrogen or a substituted or non-substituted hydrocarbon group;
• each of m and n is a number indicating the polymerization degree provided that m is not less than 10 and n is not less than 0;
• and,
• a compound comprising a maleimide or anhydride.