Calixarene compound and photoresist composition comprising same
AssigneeRohm and Haas Electronic Materials LLC
InventorsD. Patrick Green, Vipul Jain, Brad C. Bailey
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Abstract
A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
Claims11
A molecular glass compound comprising:
- A.) a tetrameric reaction product of:
- an aromatic compound of formula (I):
- C6R1x(OR2)y (I)
- wherein R1 is H, F, C1-20 alkyl, C1-20 haloalkyl, C6-20 aryl, C6-20 haloaryl, C7-20 aralkyl, or C7-20 haloaralkyl, R2 is H, C1-20 alkyl, C1-20 haloalkyl, x is 6-y and y is 2 or 3, at least one OR2 group is a hydroxy group, and at least two OR2 groups are meta to one another, and
- a polycyclic or fused polycyclic aromatic aldehyde of formula (II)
- Ar1—CHO (II)
- wherein Ar1 is a substituted, halosubstituted or unsubstituted C4-20 heterocyclic aromatic-containing moiety, or a substituted, halosubstituted or unsubstituted C8-20 fused polycylic aromatic moiety, and
- B.) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound, a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde, or a combination comprising at least one of the foregoing.
Dependencies are inferred from the claim text.