Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus

An organic layer deposition apparatus for forming an organic layer on a substrate, the apparatus comprising:

• a deposition source for discharging a deposition material;
• a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles;
• a patterning slit sheet arranged opposite to the deposition source nozzle unit and including a plurality of patterning slits;
• an electrostatic chuck, the substrate being attachable to and detachable from the electrostatic chuck;
• chuck moving members combined with the electrostatic chuck and configured to move the electrostatic chuck;
• and
• guide members to guide movement of the chuck moving members,
• wherein the chuck moving members comprise first magnetic force generators,
• wherein the guide members comprise second magnetic force generators corresponding to the first magnetic force generators,
• wherein the chuck moving members are movable on the guide members by magnetic forces generated by the first magnetic force generators and the second magnetic force generators,
• wherein the substrate is spaced apart from the patterning slit sheet, and at least one of the substrate or the patterning slit sheet is movable relative to the other, and
• wherein the patterning slit sheet is smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction.