US 2013/0156949 A1Published application

Methods of fabricating porous media and inorganic selective membrane

AssigneeIndustrial Technology Research Institute

InventorsMeng-Chang Lin, Yu-Li Lin, Yen-Hsun Chi, Ting-Wei Huang

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Abstract

A method of fabricating a porous media is provided. In the method, a metal mesh is provided. The metal mesh includes interlaced metal wires, and first holes are formed among the metal wires. An area of each first hole ranges from 1 μm2 to 10,000 μm2, and an area error between the first holes is less than 5%. A metal layer covers the metal wires, so as to form the porous media with second holes. By controlling the thickness of the metal layer, an area of each second hole is reduced to 0.01 μm2 to 1 μm2, and an area error between the second holes is less than 5%.

Claims17

Dependent claims

A method of fabricating a porous media, comprising:

providing a metal mesh, wherein the metal mesh is formed by interlacing a plurality of metal wires, so that a plurality of first holes are formed among the metal wires, an area of each of the first holes is 1 μm2 to 10,000 μm2, and an area error between the first holes is less than 5%;
and
covering the metal wires of the metal mesh with a metal layer, so as to form the porous media with a plurality of second holes, wherein by controlling a thickness of the metal layer, an area of each of the second holes of the porous media is 0.01 μm2 to 1 μm2, and an area error between the second holes is less than 5%.

Dependencies are inferred from the claim text.