Method and apparatus for forming nanoparticles
AssigneeCambridge Enterprise Limited
InventorsJohn Robertson, C. Santiago Esconjauregui
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Abstract
A first layer of a catalyst material is formed on a substrate and heat treated to form a first plurality of nanoparticles. A second layer of a catalyst material is then formed over the substrate and the first plurality of nanoparticles and heat treated to form a second plurality of nanoparticles. The first layer of nanoparticles is advantageously not affected by the deposition or heat treatment of the second layer of catalyst material, for example being pinned or immobilised, optionally by oxidation, before formation of the second layer.
Claims31
A method for fabricating catalyst nanoparticles to serve as growth nuclei for carbon nanotubes (CNTs), comprising the steps of:
- (A) forming a layer of a catalyst material over a substrate, and heat treating the layer to form a plurality of catalyst nanoparticles;
- and
- (B) forming a further layer of catalyst material over the substrate and the catalyst nanoparticles, and heat treating the further layer to form a further plurality of catalyst nanoparticles.
An electronic device comprising a conducting element formed from carbon nanotubes grown on a substrate provided with catalyst nanoparticles, in which the nanoparticles are fabricated as defined in any of claim(s) 1 to 15.
A substrate provided with catalyst nanoparticles to serve as growth nuclei for carbon nanotubes, in which the nanoparticles comprise first and second pluralities of nanoparticles formed over the same substrate.
An electronic device comprising a conducting element formed from carbon nanotubes grown on a substrate provided with catalyst nanoparticles, in which the nanoparticles comprise first and second pluralities of nanoparticles formed over the same substrate.
An apparatus for fabricating catalyst nanoparticles to serve as growth nuclei for carbon nanotubes, comprising:
- a reactor for forming a layer of a catalyst material over a substrate;
- a heater for heat treating the layer of catalyst material to form a plurality of catalyst nanoparticles;
- and
- a controller for controlling the apparatus to repeat the formation of layers of catalyst material and the heat treatment to form one or more further pluralities of catalyst nanoparticles.
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Dependencies are inferred from the claim text.