Process for separating monosilane from chlorosilanes-rich mixture

A process for separating monosilane from a mixture comprising at least monosilane, monochlorosilane, dichlorosilane, and trichlorosilane comprising:

• a) introducing said mixture to a condenser (3) for separating lower-boiling chlorosilanes-containing monosilane from higher-boiling chlorosilanes enriched condensates;
• b) collecting said higher-boiling condensates, in a condensate buffer (19) connected to the aforesaid condenser (3) by a condensate feed pipe (8);
• c) sending higher-boiling chlorosilanes enriched condensates from the aforesaid condensate buffer (19) into a subcooler (21) which is installed on a reflux feed line (7) connected to the upper portion of a chlorosilane absorber (20);
• d) feeding aforesaid lower-boiling chlorosilanes-containing monosilane to the aforesaid chlorosilane absorber (20) for separating monosilane;
• e) extracting monosilane-rich gas from the upper portion of the aforesaid chlorosilane absorber (20);
• characterized in that only one condenser (3) is used during the process.