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US 2013/0156675 A1Published application
Process for production of silane and hydrohalosilanes
AssigneeREC Silicon Inc
InventorWilliam C. Breneman
Life of this patent
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Abstract
Embodiments of a system and process for the production of ultra-high purity silane and hydrohalosilanes of the general formula HySiX4-y (y=1, 2, or 3) by a reactive distillation method are disclosed.
Claims14
A system for producing hydrosilanes, comprising:
- (a) a first multi-zone fractional distillation column (2) comprising
- a vessel defining a plurality of distillation zones,
- a reactant stream inlet (1),
- a first distillate stream outlet (5) positioned above the reactant stream inlet (1),
- a first product flow inlet (8) positioned between the reactant stream inlet (1) and the first distillate stream outlet (5),
- a bottom outlet (31), and
- a vapor outlet (32) positioned above the first distillate stream outlet (5);
- (b) a first catalytic redistribution reactor (7) comprising
- a vessel defining a chamber,
- an inlet (7a),
- a product flow outlet (7b) spaced apart from the inlet (7a), and
- a fixed-bed catalyst disposed within the chamber between the inlet (7a) and the product flow outlet (7b), wherein the product flow outlet (7b) is in communication with the first product flow inlet (8) of the first multi-zone fractional distillation column (2), and wherein the first catalytic redistribution reactor (7) does not include a pressure equilibrium outlet or a vapor return outlet;
- (c) a first pump (6) operable to pump a first distillate stream (B) from the first distillate stream outlet (5) into the first catalytic redistribution reactor (7);
- and
- (d) a condenser (28) in communication with the vapor outlet (32) of the first multi-zone fractional distillation column (2).
12 more elements
A method for producing hydrosilanes, comprising:
- passing a reactant stream (A) comprising one or more hydrohalosilanes of formula HySiX4-y where X is a halogen and y is 1, 2, or 3 into a first multi-zone fractional distillation column (2) comprising a vessel defining a plurality of distillation zones including a first distillation zone (Z1) and a second distillation zone (Z2) located above the first distillation zone (Z1), wherein the reactant stream (A) is passed into the first multi-zone distillation column (2) through a reactant stream inlet (1) positioned at a height corresponding to the height of the first distillation zone (Z1);
- maintaining the first distillation zone (Z1) at a temperature T1 that corresponds to a boiling point of the reactant stream at a pressure within the vessel;
- maintaining the second distillation zone (Z2) at a temperature T2 at which liquid and/or vapor in the second distillation zone (Z2) has a halogen to silicon molar ratio between 2.8 and 3.2;
- pumping a first distillate stream (B) from the first multi-zone fractional distillation column (2) via a first distillate stream outlet (5) positioned at a height corresponding to the height of the second distillation zone (Z2) through a first fixed-bed catalytic redistribution reactor (7) that does not include a pressure equilibrium outlet or a vapor return outlet to form a first product flow (C), and then back into the first multi-zone distillation column (2) via a first product flow inlet (8) positioned below the first distillate stream outlet (5) and above the reactant stream inlet (1);
- and
- passing vapor (E) from an upper portion of the first multi-zone fractional distillation column (2) to a condenser (28) to produce a condensate (F) comprising HzSiX4-z where z=y+1.
3 more elements
Dependencies are inferred from the claim text.