Microfluidic device and method of manufacturing the same

A microfluidic device comprising:

• a substrate having a micro-flow path and a valve seat protruding into the micro-flow path;
• and
• a polymer film disposed on a surface of the substrate and comprising a bonding unit bonded to the substrate and a variable unit having a variable shape according to pressure,
• wherein the variable unit has a curvature and is spaced apart from the valve seat when pressure is not provided to the variable unit.

A method of manufacturing a microfluidic device, the method comprising:

• providing a first substrate including a micro-flow path and a valve seat protruding toward the micro-flow path;
• providing a second substrate including a cavity corresponding to the valve seat;
• disposing a polymer film between the first substrate and the second substrate;
• and
• bonding the first substrate, the second substrate, and the polymer film by applying pressure and heat thereto, wherein a part of the polymer film has a curvature.

A method of manufacturing a microfluidic device, the method comprising:

• providing a substrate having a planar surface;
• providing a sacrificing substrate including a cavity;
• disposing a polymer film between the substrate and the sacrificing substrate;
• and
• bonding the substrate, the sacrificing substrate, and the polymer film by applying pressure and heat thereto, wherein a part of the polymer film has a curvature.