Transfer robot

Abstract

A transfer robot includes a first arm having a base end portion rotatably connected to an arm base, the first arm including a specified drive system arranged therein, a second arm having a base end portion rotatably connected to a tip end portion of the first arm, and a hand having a hand base rotatably connected to a tip end portion of the second arm, the hand serving to hold a substrate. The first arm includes an arm housing provided with a plurality of air injection holes and at least one air exhaust hole are provided. The first arm is configured such that a compressed air injected through the air injection holes flows along an inner wail surface of the arm housing and flows out through the air exhaust hole.

Dependencies are inferred from the claim text.