Electrodynamic speaker structure having mems technology
AssigneesUniversite Paris-Sud 11, Universite Du Maine
InventorsGuy Lemarquand, Valerie Lemarquand, Elie Marie Lefeuvre, Marion Alexandra Laurence Woytasik, Johan Moulin, Fabien Jean François Parrain
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Abstract
Said electrodynamic speaker structure having MEMS technology, comprising a stator-forming means (2), diaphragm-forming means (3), and resiliently shape-changing means (4) for connecting all of said means, is characterized in that the stator-forming means (2), diaphragm-forming means (3), and connecting means (4) are made of a single part by machining a silicon chip.
Claims16
An electrodynamic speaker structure having MEMS technology, comprising a stator-forming means, diaphragm-forming means, and resiliently shape-changing means for connecting all of said means, wherein the stator-forming means, diaphragm-forming means, and connecting means are made of a single part by machining a silicon chip.
Dependencies are inferred from the claim text.