Back to results
US 2013/0155796 A1Published application
Fabrication and testing method for nonvolatile memory devices
AssigneeSamsung Electronics Co., Ltd.
InventorHiroshi Sugawara
Life of this patent
Estimating the term…
Abstract
Provided is a plurality of master chips arranged in a row on the wafer, each master chip including a power supply circuit provides a power supply voltage, and a plurality of slave chips arranged in a column to at least one side of a corresponding master chip among the plurality of master chips, each slave chip including a memory cell array functionally operative in response to the power supply voltage provided by the corresponding master chip during wafer level testing.
Claims20
A semiconductor wafer, comprising:
- a plurality of master chips arranged in a row on the wafer, each master chip including at least one master control circuit that provides at least one control signal;
- and
- a plurality of slave chips arranged in a column to at least one side of a corresponding master chip among the plurality of master chips, each slave chip including a slave control circuit responsive to the at least one control signal provided by the corresponding master chip during wafer level testing.
A semiconductor wafer, comprising:
- a plurality of master chips arranged in a row on the wafer, each master chip including a power supply circuit provides a power supply voltage;
- and
- a plurality of slave chips arranged in a column to at least one side of a corresponding master chip among the plurality of master chips, each slave chip including a memory cell array functionally operative in response to the power supply voltage provided by the corresponding master chip during wafer level testing.
A method of fabricating semiconductor devices, comprising:
- fabricating a plurality of master chips arranged in a row on a wafer, wherein each master chip includes a master control circuit that provides a control signal;
- and
- fabricating a plurality of slave chips arranged in a column to at least one side of a corresponding master chip among the plurality of master chips on the wafer, wherein each slave chip includes a slave control circuit responsive to the control signal provided by the corresponding master chip, wherein the fabricating the plurality of master chips and fabricating the plurality of slave chips is performed by a common set of fabrication processes.
Dependencies are inferred from the claim text.