Extended and independent rf powered cathode substrate for extreme edge tunability

A substrate support, comprising:

• a first electrode having a peripheral edge;
• a substrate support surface disposed above the first electrode;
• a second electrode disposed about the first electrode and extending radially beyond the peripheral edge of the first electrode;
• a first dielectric layer disposed about the peripheral edge of the first electrode;
• and
• a grounding layer disposed about the first dielectric layer, wherein the second electrode is at least partially disposed above the first dielectric layer.

A substrate support, comprising:

• a support surface;
• a first electrode disposed within the substrate support and having a peripheral edge that extends beyond a peripheral edge of the support surface;
• a second electrode disposed within the substrate support and having a peripheral edge that extends beyond the peripheral edge of the first electrode;
• an dielectric layer disposed about the peripheral edge of the first electrode;
• and
• a grounding layer disposed about the dielectric layer.