Microscope apparatus for phase image acquisition
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFu-Sheng CHU, Chih-Shiang CHOU, Yu-Po TANG, Yan-Ying HE
Life of this patent
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFu-Sheng CHU, Chih-Shiang CHOU, Yu-Po TANG, Yan-Ying HE
Estimating the term…
A microscope apparatus includes a condenser lens to make an illuminating electromagnetic wave relatively homogeneous, a first beam splitter splitting the illuminating electromagnetic wave after the condenser lens, a movable reflector module, a second beam splitter, an objective lens to project the illuminating electromagnetic wave propagating after an object to be observed toward an observing device. The object is loaded between the first beam splitter and the second beam splitter. The microscope apparatus is configured to split the illuminating electromagnetic wave into two paths at the first beam splitter. A first path goes through the first and the second beam splitters, and a second path goes through the movable reflector module to rejoin the first path at the second beam splitter. The microscope apparatus is configured acquire phase images with interferences of the electromagnetic wave from the two paths with at least two distance settings of the movable reflector module.
A microscope apparatus, comprising:
A method of acquiring phase images, comprising:
A microscope apparatus, comprising:
Dependencies are inferred from the claim text.