Plasmonic modulator incorporating a solid-state phase change material

A method for fabricating a nanoscale plasmonic modulator comprising:

• depositing a solid-state phase change material on a first substrate;
• depositing a first plasmonic layer on the solid-state phase change material, such that the solid-state phase change material is substantially covered by the first plasmonic layer;
• depositing a second plasmonic layer on a second substrate;
• bonding the first substrate to the second substrate, such that the first plasmonic layer is joined to the second plasmonic layer;
• and
• etching substantially all of the first substrate to expose the solid-state phase change material.

A nanoscale plasmonic modulator assembly for modulating light of a wavelength of interest comprising:

• a plasmonic layer that is substantially opaque to light of the wavelength of interest;
• a dielectric layer that is substantially transparent to light of the wavelength of interest
• a layer of vanadium oxide;
• and
• a control mechanism configured to alter the phase of the vanadium oxide between a metallic phase and an insulator phase;
• wherein each of the plasmonic layer, the dielectric layer, and the layer of vanadium oxide are configured as to provide a plasmonic mode of transmission for light of the wavelength of interest.