Measuring apparatus including multi-wavelength interferometer

A measuring apparatus for measuring a position or a shape of a surface to be inspected, the measuring apparatus comprising:

• a multi-wavelength interferometer configured to use a plurality of light fluxes whose wavelengths are different from each other;
• and
• a control unit configured to obtain a position or a shape of the surface to be inspected by using a signal of interference light detected by the multi-wavelength interferometer,
• wherein the multi-wavelength interferometer includes
• an optical system configured to cause light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other,
• a spectroscopic unit configured to divide interference light between the light to be inspected and the reference light into each wavelength,
• a detector configured to detect the interference light and provided for each divided interference light, and
• an optical member configured to be able to adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector, and
• wherein the control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.