Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method

A carbon dioxide supply system to supply carbon dioxide from a source to a device, the supply system comprising:

• a supply line for the flow of carbon dioxide from the source to the device;
• a valve in the supply line, the valve having an open position and a closed position, where in the open position gas can flow along the supply line and in the closed position the flow of gas along the supply line is blocked;
• and
• a control system comprising:
• a first switch in the supply line to switch at a first flow rate or pressure of gas in the supply line, and
• a second switch in the supply line to switch at a second flow rate or pressure of gas in the supply line,
• wherein the control system is configured to move the valve to the closed position from the open position if (i) a signal from the first switch indicates that gas in the supply line is above a first flow rate or pressure or (ii) a signal from the second switch indicates that gas in the supply line is below the second flow rate or pressure.

An extraction system, comprising:

• a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude;
• a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve;
• and
• a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.

An extraction system for a lithographic apparatus, the system comprising:

• a conduit for a gas flow;
• a check valve in the conduit configured to open at an upstream pressure over a certain magnitude;
• a pump configured to pump the gas flow along the conduit to the check valve;
• a connector downstream of the check valve, the connector configured to fluidly connect the conduit to an external underpressure source to receive the gas flow from the conduit, the connector configured to form a connection with the external underpressure source which is fluidly connected to an ambient atmosphere.

A lithographic apparatus comprising:

• an evacuation system an evacuation system, comprising:
• a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude;
• a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve;
• and
• a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude;
• and
• a gas supply, the stop signal from the controller stopping the gas supply and/or the pump.

A lithographic apparatus and a carbon dioxide supply system, wherein:

• the carbon dioxide supply system comprises:
• a supply line for the flow of carbon dioxide from a source to a device;
• a valve in the supply line, the valve having an open position and a closed position, where in the open position gas can flow along the supply line and in the closed position the flow of gas along the supply line is blocked;
• and
• a control system comprising:
• a first switch in the supply line to switch at a first flow rate or pressure of gas in the supply line, and
• a second switch in the supply line to switch at a second flow rate or pressure of gas in the supply line,
• wherein the control system is configured to move the valve to the closed position from the open position if (i) a signal from the first switch indicates that gas in the supply line is above a first flow rate or pressure or (ii) a signal from the second switch indicates that gas in the supply line is below the second flow rate or pressure, and
• the lithographic apparatus comprises:
• a fluid handling system to provide a liquid to a space between a final element of a projection system and a facing surface and having a first gas outlet to supply a gas flow radially outward of a meniscus of liquid in the space;
• a second gas outlet radially outward of the first gas outlet to supply a flow of temperature conditioned gas onto an object;
• and
• a control system comprising a sensor to detect flow and/or pressure at or upstream of the second gas outlet, the control system configured to stop the supply of the gas flow radially outward of the meniscus of liquid if a signal from the sensor indicates that flow and/or pressure at or upstream of the second gas outlet is below a certain magnitude.

A pump system, comprising:

• a liquid lubricated pump adapted to pump a gas;
• a first container to receive gas and liquid from the pump, the first container comprising an exhaust outlet to provide gas therethrough and comprising an overflow outlet below the exhaust outlet to provide liquid therethrough;
• a second container in fluid communication with the overflow outlet, the second container comprising a drain outlet;
• a pump downstream of the drain outlet;
• and
• a check valve, downstream of the pump, configured to open at an upstream pressure over a certain magnitude.

A lithographic apparatus comprising:

• a carbon dioxide supply system to provide carbon dioxide from a source to a device;
• and
• a control system configured to turn off the carbon dioxide supply system if one or more of the following occurs:
• (i) a pressure sensor generates a signal indicative of a pressure of gas between a pump and a check valve in an extraction system is below a certain magnitude;
• (ii) a sensor generates a signal indicative that flow rate and/or pressure at or upstream of a gas outlet to provide a flow of temperature conditioned gas is below a certain magnitude;
• (iii) a signal from a switch indicates that gas in a supply line of the carbon dioxide supply system is above a first flow rate or pressure or is below a second flow rate or pressure;
• and/or
• (iv) a signal from a sensor indicates an attempted access to a volume to which carbon dioxide is supplied from the carbon dioxide supply system.

A method of controlling supply of carbon dioxide, wherein the carbon dioxide supply is turned off if one or more of the following occurs:

• (i) a pressure sensor generates a signal indicative of a pressure of gas between a pump and a check valve in an extraction system is below a certain magnitude;
• (ii) a sensor generates a signal indicative that flow rate and/or pressure at or upstream of a gas outlet to provide a flow of temperature conditioned gas is below a certain magnitude;
• (iii) a signal from a switch indicates that gas in a supply line of a carbon dioxide supply system is above a first flow rate or pressure or is below a second flow rate or pressure;
• and/or
• (iv) a signal from a sensor indicates an attempted access to a volume to which carbon dioxide is supplied from a carbon dioxide supply system.