Display panel and method for producing the same

A display panel that has:

• a display region including a plurality of pixels,
• a terminal region disposed outer than said display region, as seen in a plane, and
• an intermediate region located between said display region and said terminal region;
• and
• a drive element for driving said pixel,
• said drive element including a gate electrode, a gate insulating film covering said gate electrode, and a source electrode partially covering said gate insulating film,
• said terminal region having a plurality of gate terminals and a plurality of source terminals disposed therein alternately as seen in a plane, said plurality of gate terminals being formed of a gate metal layer that is the same layer as said gate electrode, said plurality of source terminals being formed of a source metal layer that is the same layer as said source electrode,
• from each of said source terminals a source terminal lead extending toward said intermediate region, said source terminal lead being formed of said source metal layer,
• said intermediate region being provided with inorganic insulating film such that said source terminal lead is covered therewith, and organic insulating film such that said inorganic insulating film is covered therewith,
• said intermediate region including a first sub-intermediate region with said organic insulating film having a first thickness, and a second sub-intermediate region located between said first sub-intermediate region and said terminal region with said organic insulating film having a second thickness smaller than said first thickness,
• said inorganic insulating film being interrupted at a boundary between said second sub-intermediate region and said terminal region to expose at least a portion of a surface of said source terminal.

A method for producing a display panel that has:

• a display region including a plurality of pixels,
• a terminal region disposed outer than said display region, and
• an intermediate region located between said display region and said terminal region;
• and
• a drive element for driving said pixel, the method comprising the steps of:
• depositing a gate metal layer on a surface of a substrate;
• patterning said gate metal layer to provide a plurality of gate electrodes, gate terminal leads extending from said plurality of gate electrodes, respectively, and a plurality of gate terminals connected to said gate terminal leads at their respective ends;
• providing a gate insulating film such that said plurality of gate electrodes and said gate terminal leads are covered therewith;
• depositing a source metal layer such that said gate insulating film is covered therewith;
• patterning said source metal layer to provide a plurality of source terminals alternating with said plurality of gate terminals and a source terminal lead extending from each of said plurality of source terminals;
• depositing inorganic insulating film such that said plurality of source terminals and said source terminal lead are covered therewith;
• depositing organic insulating film such that said inorganic insulating film is covered therewith;
• exposing said organic insulating film to light via a mask having a light shielding portion that does not transmit light, an opening that transmits light as it is, and a halftone portion adjacent to both said light shielding portion and said opening and transmitting light at a transmittance smaller than said opening;
• developing said organic insulating film to provide an intermediate region having said organic insulating film with a large thickness, and a terminal region including a portion with said organic insulating film left with a small thickness and a portion without said organic insulating film;
• and
• etching said inorganic insulating film with said organic insulating film used as a mask so that said portion without said organic insulating film has said plurality of source terminals exposed and said terminal region at said portion with said organic insulating film left with said small thickness no longer has said organic insulating film and has said inorganic insulating film reduced to be smaller in thickness than that in a region covered with said organic insulating film.