Substrate inspection jig and substrate inspection method
AssigneeRicoh Company, Ltd.
InventorsKeishi Miyanishi, Yuji Miura, Shinji Nagai, Tomohiko Shiki, Tadayoshi Shibasaki, Hideo Watanabe, Katsuhiro Tanabe, Hiroyuki Inakazu, Yasukazu Sadakane, Tomoko Kawakami
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