Substrate holding device and method, and inspection apparatus and method using the substrate holding device and method

An inspection apparatus for inspecting a substrate, comprising:

• a substrate mounting device;
• wherein the substrate mounting device includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon,
• a structure formed at a portion opposed to a rear surface of the substrate, and
• a first control section for controlling pressure between the rear surface of the substrate and the structure,
• wherein the first control section includes a second control section for controlling volume between the rear surface of the substrate and the structure.

An inspection apparatus for inspecting a substrate, comprising:

• a substrate mounting device;
• wherein the substrate mounting device includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon,
• a structure formed at a portion opposed to a rear surface of the substrate, and
• a first control section for controlling pressure between the rear surface of the substrate and the structure,
• wherein the holding section includes a second piezo element, and
• the inspection apparatus includes a second drive section for driving the second piezo element.

An inspection method for inspecting a substrate, comprising the steps of:

• controlling flatness of the substrate by controlling pressure on a rear surface side of the substrate;
• and
• inspecting the substrate,
• wherein concavity-convexity is formed on a portion opposed to the rear surface of the substrate, and
• volume between the rear surface of the substrate and the concavity-convexity is controlled.