Integrated magnetic field sensor and method for a measurement of the position of a ferromagnetic workpiece with an integrated magnetic field sensor

A method for a determination of a position of a ferromagnetic component, the method comprising:

• providing an integrated magnetic field sensor, the integrated magnetic field sensor comprising:
• a semiconductor body with a surface and a rear surface;
• a metal carrier with a front and a rear, wherein the semiconductor body is connectable by the rear surface to the front of the metal carrier in a non-positive manner;
• a Hall sensor arranged on the surface of the semiconductor body, with a main extension surface;
• a magnet with a first magnetic pole arranged along a first surface and a central axis arranged in a perpendicular manner on the first surface;
• arranging the metal carrier, the magnet and the semiconductor body in a common housing;
• arranging precisely one or at least one Hall sensor in the housing;
• arranging the first surface of the magnet perpendicular to the main extension surface of the Hall sensor, the central axis running parallel to the main extension plane of the Hall sensor, the central axis passing in a perpendicular manner through a normal of the main extension surface in a centroid of the main extension surface, field lines of the magnet running essentially parallel to the main extension surface of the Hall sensor so that a Hall voltage is generated when a part of the magnetic field lines are deflected by a ferromagnetic component perpendicular to the main extension plane of the Hall sensor;
• and
• arranging the magnet on a front of the metal carrier.