Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device

Abstract

A piezoelectric material contains a perovskite oxynitride expressed by the General Formula: In the formula, x, y, z and w are numerical values satisfying the relationships: 0≦x≦1, 0≦y≦1, 0<z<⅓, and 0<w≦z. Also, z can be 0.1≦z≦0.2. The piezoelectric material may be in the form of a film having a thickness in the range of 200 nm to 10 μm that is disposed on a substrate. The perovskite oxynitride may have a tetragonal crystal structure. (Ba1-xSrx)(Ti1-3z(Nb1-yTay)3z)(O1-wNw)3

Dependencies are inferred from the claim text.