External force detection equipment

An external force detection equipment for detecting an external force applied to a piezoelectric element, comprising:

• a piezoelectric element, cantilevered onto a support portion in one end side;
• a pair of excitation electrodes, one excitation electrode and the other excitation electrode being provided in one face side and the other face side, respectively, of the piezoelectric element to vibrate the piezoelectric element;
• an oscillator circuit, electrically connected to the one excitation electrode;
• a movable electrode, for forming a variable capacitance, the movable electrode being provided in a portion distant from the one end side of the piezoelectric element and electrically connected to the other excitation electrode;
• a stationary electrode, provided separately from the piezoelectric element and oppositely to the movable electrode and connected to the oscillator circuit so as to form a variable capacitance based on a capacitance change between the stationary electrode and the movable electrode caused by a deflection of the piezoelectric element;
• a frequency information detection unit, for detecting a signal as frequency information corresponding to an oscillation frequency of the oscillator circuit;
• and
• a neutralization path, for discharging an electrostatic charge generated in the piezoelectric element to the ground by connecting the piezoelectric element to the ground,
• wherein an oscillation loop including the oscillator circuit, the one excitation electrode, the other excitation electrode, the movable electrode, and the stationary electrode is formed, and
• the frequency information detected by the frequency information detection unit is used to evaluate a force applied to the piezoelectric element.