Process for treating a substrate using a luminous flux of determined wafelength, and corresponding substrate
AssigneeSoitec
InventorMichel Bruel
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AssigneeSoitec
InventorMichel Bruel
Estimating the term…
A substrate is treated by means of at least one pulse of a luminous flux of determined wavelength. The substrate comprises an embedded layer that absorbs the luminous flux independently of the temperature. The embedded layer is interleaved between a first treatment layer, layer and a second treatment layer. The first treatment layer has a coefficient of absorption of luminous flux that is low at ambient temperature and grows as the temperature rises. The luminous flux may be applied in several places of the surface of the first layer to heat regions of the embedded layer and generate a propagating thermal front in the first layer opposite the heated regions of the embedded layer, which generate constraints within the second layer.
-15. (canceled)
A method of treating a substrate using a luminous flux of determined wavelength, comprising:
A substrate, comprising:
Dependencies are inferred from the claim text.