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US 2013/0154063 A1Published application
Driving substrate, display device, planarizing method, and method of manufacturing driving substrate
AssigneeSony Corporation
InventorsKenta Masuda, Keiichi Akamatsu, Yuichi Kato
Life of this patent
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Abstract
A driving substrate includes: a protective layer including an etching surface; and a film layer including one or more convex portions on a surface thereof, the film layer being in contact with a rear surface of the protective layer, the one or more convex portions each having a surface being flush with the etching surface.
Claims12
A driving substrate comprising:
- a protective layer including an etching surface;
- and
- a film layer including one or more convex portions on a surface thereof, the film layer being in contact with a rear surface of the protective layer, the one or more convex portions each having a surface being flush with the etching surface.
A display device with a driving substrate and a display layer, the driving substrate comprising:
- a protective layer including an etching surface;
- and
- a film layer including one or more convex portions on a surface thereof, the film layer being in contact with a rear surface of the protective layer, the one or more convex portions each having a surface being flush with the etching surface.
A planarizing method comprising:
- forming a substrate by providing a protective layer on a film layer, the protective layer and the film layer having substantially same etching resistance, and the film layer including one or more convex portions on a surface thereof;
- and
- planarizing a surface of the substrate by etching the one or more convex portions of the film layer together with the protective layer.
A method of manufacturing a driving substrate, the method comprising:
- forming a substrate by providing a protective layer on a film layer, the protective layer and the film layer having substantially same etching resistance, and the film layer including one or more convex portions on a surface thereof;
- and
- planarizing a surface of the substrate by etching the one or more convex portions of the film layer together with the protective layer;
- and
- forming a driving circuit on the planarized surface of the substrate.
2 more elements
Dependencies are inferred from the claim text.