Photonic Systems and Methods of Forming Photonic Systems

A photonic system, comprising:

• a silicon-containing waveguide over a base;
• an opening extending into the base;
• a liner narrowing the opening;
• germanium-containing detector material over the base and extending into the narrowed opening;
• the detector material being part of a detector configured to detect light within the waveguide;
• a lower region of the germanium-containing detector material within the narrowed opening having a higher concentration of defects than an upper region of the germanium-containing detector material above the narrowed opening;
• and
• wherein the upper region extends laterally outwardly beyond the liner so that some of the upper region is directly over the liner.

A photonic system, comprising:

• a silicon-containing waveguide over a monocrystalline silicon base;
• an opening extending into the base;
• a liner narrowing the opening;
• a germanium-containing detector material over the base and extending into the narrowed opening;
• the detector material being part of a detector configured to detect light within the waveguide;
• a region of the germanium-containing detector material within the narrowed opening having a higher concentration of defects than a region of the germanium-containing detector material outside of the narrowed opening;
• wherein the silicon-containing waveguide is comprised by a line spaced from the monocrystalline silicon base by one or more materials;
• wherein the liner comprises a liner material;
• and
• wherein the liner material is along sidewalls of the silicon-containing waveguide line.

A method of forming a photonic system, comprising:

• forming an opening into a monocrystalline material;
• lining sidewalls of the opening with liner material, while leaving monocrystalline material exposed along a bottom of the lined opening;
• epitaxially growing a detector material from the exposed monocrystalline material along the bottom of the lined opening;
• the detector material having a lower region within the lined opening and having an upper region over the lower region;
• the lower region having a higher concentration of defects than the upper region;
• the upper region extending laterally outward of the lower region and being across the liner material;
• and
• forming a silicon-containing waveguide over the base and within range of a detector comprising the detector material such that the detector can be utilized to ascertain presence of light within the waveguide.