Data storage device and methods of manufacturing the same

A data storage device comprising:

• a plurality of cell selection parts formed at least in part in a substrate;
• a first interlayer dielectric layer, a plate conductive pattern, and a second interlayer dielectric layer sequentially stacked on the cell selection parts, the plate conductive pattern covering the cell selection parts, and the plate conductive pattern electrically connected to first terminals of the cell selection parts;
• a plurality of through-pillars successively penetrating the second interlayer dielectric layer, the plate conductive pattern, and the first interlayer dielectric layer, the plurality of through-pillars electrically connected to second terminals of the cell selection parts, respectively, and the plurality of through-pillars insulated from the plate conductive pattern;
• and
• a plurality of data storage parts disposed on the second interlayer, the plurality of data storage parts respectively connected to top surfaces of the through pillars.

A data storage device comprising:

• a plurality of cell selection parts formed at least in part in a substrate;
• a lower dielectric layer disposed on the cell selection parts;
• a plurality of data storage parts disposed on the lower dielectric layer;
• a first interlayer dielectric layer, a plate conductive pattern, and a second interlayer dielectric layer sequentially stacked on the data storage parts;
• and
• a plurality of through-pillars successively penetrating the second interlayer dielectric layer, the plate conductive pattern, and the first interlayer dielectric layer, the plurality of through-pillars connected to top surfaces of the data storage parts, respectively,
• wherein the through-pillars are insulated from the plate conductive pattern, the plate conductive pattern is electrically connected to first terminals of the cell selection parts, and the data storage parts are electrically connected to second terminals of the cell selection parts, respectively.

A data storage device comprising:

• a substrate;
• a plurality of data storage elements that form an array;
• a plurality of through-pillars, each through-pillar electrically connecting one of a plurality of first source/drain regions of the substrate to one of the data storage elements;
• and
• a plate conductive pattern disposed between the plurality of first source/drain regions of the substrate and the data storage elements,
• wherein the plate conductive pattern includes a plurality of holes, which the plurality of through-pillars pass through.

A data storage device comprising:

• a substrate, including a plurality of cell selection parts;
• a plurality of data storage parts disposed above the plurality of cell selection parts;
• a plurality of bit lines electrically connected to the plurality of data storage parts, and disposed above the plurality of data storage parts;
• and
• a plate conductive pattern disposed between the substrate and the plurality of bit lines, wherein:
• the plate conductive pattern includes a plurality of plate holes through which a plurality of respective pillars extend;
• and
• the plate conductive pattern is electrically connected to the plurality of cell selection parts and is electrically insulated from the plurality of data storage parts.