Piezoelectric devices and methods for their preparation and use
AssigneeIndian Institute of Technology Madras
InventorsManeesh Chandran, M.S. Ramachandra Rao
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Abstract
Methods for fabricating a piezoelectric device are provided. The methods can include providing a substrate and forming a nanocrystalline diamond layer on a first surface of the substrate. The methods can also include depositing a piezoelectric layer on a first surface of the nanocrystalline diamond layer.
Claims33
A method for fabricating a piezoelectric device, the method comprising:
- providing a substrate;
- forming a nanocrystalline diamond (NCD) layer on a first surface of the substrate;
- and
- depositing a piezoelectric layer on a first surface of the nanocrystalline diamond layer.
-6. (canceled)
A method for fabricating a piezoelectric device, the method comprising:
- providing a diamond substrate;
- and
- depositing a lead zirconate titanate (PZT) layer on a first surface of the diamond substrate such that the lead zirconate titanate layer is a crystalline perovskite phase layer.
-19. (canceled)
A piezoelectric device, comprising:
- a substrate;
- a nanocrystalline diamond (NCD) layer disposed on a first surface of the substrate;
- and
- a perovskite piezoelectric layer deposited on a first surface of the nanocrystalline diamond layer.
(canceled)
(canceled)
A method of using a piezoelectric device as a surface acoustic wave (SAW) device, wherein the piezoelectric device comprises:
- providing a piezoelectric device comprising:
- a substrate;
- a nanocrystalline diamond (NCD) layer disposed on a first surface of the substrate;
- and
- a perovskite piezoelectric layer disposed on a first surface of the nanocrystalline diamond layer;
- and
- depositing an interdigital transducer (IDT) layer on the perovskite piezoelectric layer of the piezoelectric device.
(canceled)
(canceled)
Dependencies are inferred from the claim text.