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US 2013/0153901 A1Published application
BSI Image Sensor Chips and Methods for Forming the Same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShiu-Ko JangJian, Kei-Wei Chen, Ying-Lang Wang
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Abstract
A device includes semiconductor substrate having a front side and a backside. A polysilicon layer is disposed on the backside of the semiconductor substrate. The polysilicon layer includes a portion doped with a p-type impurity. A dielectric layer is disposed on the backside of the semiconductor substrate, wherein the polysilicon layer is between the semiconductor substrate and the polysilicon layer.
Claims20
A device comprising:
- a semiconductor substrate comprising a front side and a backside;
- a polysilicon layer on the backside of the semiconductor substrate, wherein the polysilicon layer comprises a portion doped with a p-type impurity;
- and
- a dielectric layer on the backside of the semiconductor substrate, wherein the polysilicon layer is between the semiconductor substrate and the polysilicon layer.
1 more element
A device comprising:
- a semiconductor substrate;
- a first and a second image sensor at a front surface of the semiconductor substrate;
- an oxide layer over and contacting a back surface of the semiconductor substrate;
- a polysilicon layer over the oxide layer, wherein the polysilicon layer comprises a p-type impurity;
- a metal shielding layer over the polysilicon layer, wherein the metal shielding layer is over and aligned to the first image sensor;
- and
- a passivation layer over the metal shielding layer.
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A method comprising:
- grinding a backside of a semiconductor substrate, wherein a remaining portion of the semiconductor substrate has a back surface;
- depositing a polysilicon layer over the back surface of the semiconductor substrate, wherein the polysilicon layer is on a backside of the semiconductor substrate;
- and
- during the step of depositing the polysilicon layer, in-situ doping a p-type impurity into the polysilicon layer.
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Dependencies are inferred from the claim text.