Extreme ultraviolet light generation apparatus
AssigneeGigaphoton Inc.
InventorOsamu Wakabayashi
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Abstract
An apparatus uses first and second laser beams from a laser apparatus to generate extreme ultraviolet light. The apparatus may include a chamber provided with at least one inlet through which at least one of first and second laser beams outputted from the laser apparatus travels into the chamber. A beam shaping unit is provided on a beam path of the first laser beam for transforming the first laser beam into a hollow laser beam. A first focusing optical element is provided downstream of the beam shaping unit for focusing the hollow laser beam in a first location inside the chamber.
Claims11
An apparatus for generating extreme ultraviolet light by using first and second laser beams from a laser apparatus, the apparatus comprising:
- a chamber provided with at least one inlet through which at least one of the first and second laser beams outputted from the laser apparatus travels into the chamber;
- a beam shaping unit, provided on a beam path of the first laser beam, for transforming the first laser beam into a hollow laser beam;
- and
- a first focusing optical element, provided downstream of the beam shaping unit, for focusing the hollow laser beam on a first location inside the chamber.
Dependencies are inferred from the claim text.