Droplet generator steering system

Apparatus comprising:

• a plate-shaped first member adapted to a coupled to a frame;
• a plate-shaped second member adapted to receive a droplet generator;
• and
• a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises
• a first coupling subsystem configured to constrain lateral movement between the first member and the second member, said first coupling subsystem including a plurality of first coupling subsystem elements, each of said first coupling subsystem elements comprising at least one flexure, and
• a second coupling subsystem adapted to control inclination of the second member with respect to the first member, said first coupling subsystem including a plurality of first coupling subsystem elements, each of said first coupling subsystem elements comprising at a linear combination of a stepper motor coupled to said first member, a first flexure coupled to said stepper motor, a second flexure coupled to said first flexure, and a piezoelectric actuator coupled to said second flexure and to said second member.

Apparatus comprising:

• a first member adapted to a coupled to a frame;
• a second member adapted to receive a droplet generator;
• and
• a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure.

Apparatus comprising:

• a source adapted to produce a target of a material in a liquid state;
• a laser adapted to irradiate said target to change a state of the material from said liquid state to a plasma state to produce EUV light in an irradiation region;
• an optical system adapted to convey said EUV light from said irradiation region to a workpiece;
• said source comprising
• a target generator and
• a target generator steering system coupled to the target generator, the target generator steering system including a first member adapted to be fixed relative to said irradiation region, a second member adapted to receive the target generator and adapted to be movable with respect to said irradiation region;
• and
• a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure.

A product made using an apparatus comprising:

• a source adapted to produce a target of a material in a liquid state;
• a laser adapted to irradiate said target to change a state of the material from said liquid state to a plasma state to produce EUV light in an irradiation region;
• an optical system adapted to convey said EUV light from said irradiation region to a workpiece;
• said source comprising
• a target generator and
• a target generator steering system coupled to the target generator, the target generator steering system including a first member adapted to be fixed relative to said irradiation region, a second member adapted to receive the target generator and adapted to be movable with respect to said irradiation region;
• and
• a coupling system mechanically coupling the first member to the second member, wherein the coupling system comprises at least one flexure.