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US 2013/0153742 A1Published application
Arrangement for holding a particle beam apparatus
OwnerJürgen POMMERENKE, Matthias Langerinventors
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Abstract
An arrangement for holding a particle beam device, in particular an electron beam device, on at least one base structure, includes at least one receiving unit, at least one damping unit which is to be positioned between the base structure and the receiving unit, at least one damping element being arranged at the receiving unit, and at least one holding element being arranged at the damping element.
Claims20
Arrangement for holding a particle beam device on at least one base structure, comprising:
- at least one receiving unit,
- at least one damping unit which is to be positioned between the base structure and the receiving unit;
- at least one damping element being arranged at the receiving unit;
- and
- at least one holding element being arranged at the damping element.
2 more elements
Particle beam device being held by an arrangement on at least one base structure, the arrangement comprising:
- at least one receiving unit;
- at least one damping unit which is to be positioned between the base structure and the receiving unit;
- at least one damping element being arranged at the receiving unit;
- and
- at least one holding element being arranged at the damping element.
2 more elements
Dependencies are inferred from the claim text.