Filter for Material Supply Apparatus
AssigneeCymer, Inc.
InventorsSilvia De Dea, Sergei Kalynych, Peter Baumgart
Life of this patent
Estimating the term…
Abstract
An apparatus supplies a target material to a target location. The apparatus includes a reservoir that holds a target mixture that includes the target material and non-target particles; a supply system that receives the target mixture from the reservoir and that supplies the target mixture to the target location, the supply system including a tube and a nozzle that defines an orifice through which the target mixture is passed; and a filter inside the tube through which the target mixture is passed.
Claims23
An apparatus for supplying a target material to a target location, the apparatus comprising:
- a reservoir that holds a target mixture that includes the target material and non-target particles;
- a supply system that receives the target mixture from the reservoir and that supplies the target mixture to the target location, the supply system including a tube and a nozzle that defines an orifice through which the target mixture is passed;
- and
- a filter inside the tube through which the target mixture is passed.
A method for supplying a target material to a target location, the method comprising:
- heating a bulk substance of a target mixture until the bulk substance becomes a fluid of the target mixture, the target mixture including target material and non-target particles;
- holding the target mixture fluid within a reservoir;
- passing the target mixture fluid through a nozzle tube of a supply system;
- filtering at least some of the non-target particles from the target mixture fluid as the target mixture fluid passes through the supply system nozzle tube;
- and
- supplying the filtered target mixture fluid to the target location including passing the filtered target mixture through an orifice of a nozzle defined at the end of the nozzle tube.
An apparatus for supplying a target material to a target location, the apparatus comprising:
- a supply system that is configured to receive a target mixture from a reservoir and to supply the target mixture to a target location, the supply system including a capillary tube defining an internal passageway and a nozzle at an end of the capillary tube, the nozzle defining an orifice;
- and
- a filter inside of the internal passageway of the capillary tube and integrated with the capillary tube such that the target material passes through pores within the filter while traveling through the capillary tube.
Dependencies are inferred from the claim text.