Combinatorial heating of substrates by an inductive process and combinatorial independent heating

An induction heating system for combinatorial heating of a substrate, comprising:

• a support comprising a plurality of susceptor regions;
• a plurality of inductor coils, wherein each inductor coil is positioned under one of the susceptor regions, and
• a plurality of lifts, wherein each lift is coupled to one of the inductor coils, and
• wherein the lifts are operable to vary a relative distance between the inductor coil and the susceptor region in a combinatorial manner.

A method comprising:

• positioning a substrate on a susceptor, wherein the susceptor comprises a plurality of susceptor regions, and wherein a region of the substrate is coupled to each susceptor region;
• positioning one of a plurality of induction coils under each of the plurality of susceptor regions, wherein each induction coil is operable to apply heat to the susceptor region;
• and
• heating a first region of the substrate to a first temperature through its coupling to a first susceptor region and heating a second region of the substrate to a second temperature through its coupling to a second susceptor region.