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US 2013/0153547 A1Published application
Multi-chamber heat treatment device
OwnerKazuhiko Katsumatainventor
Life of this patent
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Abstract
A multi-chamber heat treatment device (S1) includes a plurality of treatment chambers having a heat treatment chamber, the device including: a cooling chamber (3) serving as the heat treatment chamber configured to cool a treatment target by latent heat of liquid particles; treatment chambers (1, 2) different from the cooling chamber (3); and drying devices (11, 19) configured to dry the cooling chamber (3).
Claims10
A multi-chamber heat treatment device that includes a plurality of treatment chambers having a heat treatment chamber, the device comprising:
- a cooling chamber serving as the heat treatment chamber configured to cool a treatment target by latent heat of a liquid particle;
- a treatment chamber different from the cooling chamber;
- and
- a drying device configured to dry the cooling chamber.
1 more element
Dependencies are inferred from the claim text.