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US 2013/0153545 A1Published application
Plasma jet assembly and plasma brush including the same
AssigneeElectronics and Telecommunications Research Institute
InventorsYark Yeon KIM, Han Young Yu, Yong Ju Yun, Won Ick Jang, Eun-ju Leong, Changho Han
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Abstract
Plasma jet assemblies are provided. A plasma jet assembly may include: a tube through which a gas flows; a power source providing a high frequency power exciting the gas in plasma state; a power electrode applying the high frequency power to the gas; and a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.
Claims20
A plasma jet assembly comprising:
- a tube through which a gas flows;
- a power source providing a high frequency power exciting the gas in plasma state;
- a power electrode applying the high frequency power to the gas;
- and
- a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.
2 more elements
A plasma brush comprising:
- a frame;
- a power source providing a high frequency power;
- and
- plasma jet assemblies fixed at the frame, each of the plasma jet assemblies including a tube through which a gas flows, a power electrode applying the high frequency power to the gas, and a plasma control unit removing arc discharge of a plasma gas generated in the tube by the high frequency power applied to the power electrode.
1 more element
Dependencies are inferred from the claim text.